Author:
Posselt M.,Bischoff L.,Teichert J.
Subject
Physics and Astronomy (miscellaneous)
Cited by
22 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Radiation defect dynamics in solids studied by pulsed ion beams;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2019-12
2. High resolution TEM analysis of focused ion beam amorphized regions in single crystal silicon—A complementary materials analysis of the teardrop method;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2017-01
3. Energetic Cs+ion interaction with common microelectronic materials—An investigation of a future FIB candidate source;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2016-11
4. Towards pump–probe experiments of defect dynamics with short ion beam pulses;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2013-11
5. Pulsed Ion Beam Measurement of the Time Constant of Dynamic Annealing in Si;Physical Review Letters;2012-08-27