Depth resolution improvement in secondary ion mass spectrometry analysis using metal cluster complex ion bombardment-Reference-Cited by-同舟云学术

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Depth resolution improvement in secondary ion mass spectrometry analysis using metal cluster complex ion bombardment

Published:2006-07-31 Issue:5 Volume:89 Page:053123
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Tomita M.,Kinno T.,Koike M.,Tanaka H.,Takeno S.,Fujiwara Y.,Kondou K.,Teranishi Y.,Nonaka H.,Fujimoto T.,Kurokawa A.,Ichimura S.

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.2266995

Reference9 articles.

1. Secondary ion mass spectrometry with gas cluster ion beams

2. Use of an SF[sub 5][sup +] polyatomic primary ion beam for ultrashallow depth profiling on an ion microscope secondary ion mass spectroscopy instrument

3. 15th International Conference on Secondary Ion Mass Spectrometry (SIMS XV);Gillen G.,2005

4. Production of Stable Ion Beam of Os3(CO)12with Compact Metal-Cluster-Complex Ion Source

5. Application of metal cluster complex ion beam for low damage sputtering

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1. Cluster ion beam generation from a wetted needle emitter for organic secondary ion mass spectrometry (organic SIMS) using a protic ionic liquid, propylammonium nitrate;Rapid Communications in Mass Spectrometry;2018-09-23

2. Time-of-flight secondary ion mass spectrometry (TOF-SIMS) using an ionic-liquid primary ion beam source;Surface and Interface Analysis;2014-09-12

3. Development of an Ionic-liquid Ion Beam Source for Secondary Ion Mass Spectrometry (SIMS);e-Journal of Surface Science and Nanotechnology;2014

4. Surface Analysis of Organic Materials with Polyatomic Primary Ion Sources;Cluster Secondary Ion Mass Spectrometry;2013-04-15

5. Emission characteristics of a charged-droplet beam source using vacuum electrospray of an ionic liquid;Surface and Interface Analysis;2012-06-15

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