Angular distribution of sputtered atoms from polycrystalline metal targets
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.329365
Reference19 articles.
1. Sputtering of Metal Single Crystals by Ion Bombardment
2. Controlled Sputtering of Metals by Low-Energy Hg Ions
3. Angular Distribution of Sublimed and Sputtered Particles from Ag Single Crystals
4. Evidence against Focused Chains in High-Yield Copper Sputtering
5. Sputtering Experiments with 1‐ to 5‐keV Ar+ Ions. III. Monocrystal Targets of the Hexagonal Metals Mg, Zn, Zr, and Cd
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