Excimer‐laser doping into Si thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.345531
Reference9 articles.
1. Efficient Si solar cells by laser photochemical doping
2. Ultra-shallow high-concentration boron profiles for CMOS processing
3. Fabrication of Heavily-Doped Polycrystalline Silicon Film Using a Laser-Doping Technique
4. Fabrication of submicrometer MOSFET's using gas immersion laser doping (GILD)
5. ArF excimer laser doping of boron into silicon
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