Diffusion barrier properties of carboxyl- and amine-terminated molecular nanolayers
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1775035
Reference13 articles.
1. Sequence of Mg segregation, grain growth, and interfacial MgO formation in Cu–Mg alloy films on SiO2 during vacuum annealing
2. Self-assembled near-zero-thickness molecular layers as diffusion barriers for Cu metallization
3. Self-assembled subnanolayers as interfacial adhesion enhancers and diffusion barriers for integrated circuits
4. Polyelectrolyte nanolayers as diffusion barriers for Cu metallization
5. P. G. Ganesan and G. Ramanath, in Physics of Semiconductor Devices, edited by K. N. Bhat and A. Das Gupta (Narosa, New Delhi, 2004), p. 1120.
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