Blistering of silicon crystals by low keV hydrogen and helium ions
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1413234
Reference16 articles.
1. Silicon on insulator material technology
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4. The History, Physics, and Applications of the Smart-Cut® Process
5. Beyond “Smart-Cut®” Recent Advances in Layer Transfer for Material Integration
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3. Exfoliation of β-Ga2O3 Along a Non-Cleavage Plane Using Helium Ion Implantation;ECS Journal of Solid State Science and Technology;2019
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