Apparatus for temperature programmed desorption studies of thin films
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1150201
Reference11 articles.
1. Techniques for wide range, high resolution and precision, thermal desorption measurements
2. Thermal desorption from metal surfaces: A review
3. Effects of neutral gas incorporation in molybdenum coatings produced by magnetron sputtering
4. Internal stresses in Cr, Mo, Ta, and Pt films deposited by sputtering from a planar magnetron source
5. The influence of argon pressure on the structure of sputtered molybdenum: From porous amorphous to a new type of highly textured film
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1. Temperature-programmed desorption spectrometer combining minimum gas load, fast substrate replacement, and comprehensive temperature control;Chinese Journal of Chemical Physics;2023-08-01
2. Measurement of isosteric heat of gas adsorption and Brunauer–Emmett–Teller (BET) surface area using a quartz crystal microbalance;Review of Scientific Instruments;2022-06-01
3. Mechanism of cleaning Si(100) surface using Sr or SrO for the growth of crystalline SrTiO[sub 3] films;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2002
4. Si(100) Surface Cleaning Using Sr and SrO;MRS Proceedings;2002
5. Argon inclusion in sputtered films and the effect of the gas on molybdenum field emitter arrays;Applied Physics Letters;2001-04-09
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