Submicron mapping of strain distributions induced by three-dimensional through-silicon via features
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4812481
Reference23 articles.
1. Deformation Potentials and Mobilities in Non-Polar Crystals
2. Piezoresistance Effect in Germanium and Silicon
3. Fabrication and analysis of deep submicron strained-Si n-MOSFET's
4. Effect of mechanical stress induced by etch-stop nitride: impact on deep-submicron transistor performance
5. A Logic Nanotechnology Featuring Strained-Silicon
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