Compositional homogeneity of metalorganic chemical vapor deposition grown III‐V compound semiconductor epilayers
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.347759
Reference11 articles.
1. Composition modulation in liquid phase epitaxial InxGa1−xAsyP1−ylayers lattice matched to InP substrates
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3. Pulsed‐laser atom‐probe field‐ion microscopy
4. Pulsed laser atom probe analysis of semiconductor materials
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