Hydrogen determination in Si‐rich oxide thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.362766
Reference9 articles.
1. Silicon nitride and oxynitride films
2. Ion‐bombardment‐induced transfer of H from N to Si in amorphous Si3N4
3. Annealing of plasma silicon oxynitride films
4. Infrared absorption study of N–H bonds in plasma‐deposited silicon oxynitride films
5. Characterization of Silicon‐Oxynitride Films Deposited by Plasma‐Enhanced CVD
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