Reduction of capacitive coupling in inductively coupled plasmas by solenoid coils on dielectric window-Reference-Cited by-同舟云学术

Reduction of capacitive coupling in inductively coupled plasmas by solenoid coils on dielectric window

Author:

Zheng Bocong¹^ORCID,Shrestha Maheshwar¹²,Wang Keliang¹,Schuelke Thomas¹³^ORCID,Shun’ko Evgeny⁴,Belkin Veniamin⁴,Fan Qi Hua¹³⁵^ORCID

Affiliation:

1. Fraunhofer Center for Coatings and Diamond Technologies, Michigan State University, East Lansing, Michigan 48824, USA

2. Scion Plasma LLC, Okemos, Michigan 48864, USA

3. Department of Electrical and Computer Engineering, Michigan State University, East Lansing, Michigan 48824, USA

4. Ampres, Inc., 3939 Bestech Dr. Suite D, Ypsilanti, Michigan 48197, USA

5. Department of Chemical Engineering and Materials Science, Michigan State University, East Lansing, Michigan 48824, USA

Funder

Division of Civil, Mechanical and Manufacturing Innovation

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

Reference43 articles.

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