Quantitative coherent diffractive imaging of an integrated circuit at a spatial resolution of 20 nm-Reference-Cited by-同舟云学术

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Quantitative coherent diffractive imaging of an integrated circuit at a spatial resolution of 20 nm

Published:2008-11-24 Issue:21 Volume:93 Page:214101
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Abbey Brian,Williams Garth J.,Pfeifer Mark A.,Clark Jesse N.,Putkunz Corey T.,Torrance Angela,McNulty Ian,Levin T. M.,Peele Andrew G.,Nugent Keith A

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.3025819

Reference16 articles.

1. Extending the methodology of X-ray crystallography to allow imaging of micrometre-sized non-crystalline specimens

2. Quantitative phase measurement in coherent diffraction imaging

3. Keyhole coherent diffractive imaging

4. Hard-X-Ray Lensless Imaging of Extended Objects

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