Formation of titanium nitride layers by the nitridation of titanium in high‐pressure ammonium ambient
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.104078
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1. Diffusion barriers in thin films
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5. Ambient Gas Effects on the Reaction of Titanium with Silicon
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