Periodic regrowth phenomena produced by laser annealing of ion‐implanted silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.90119
Reference14 articles.
1. Laser annealing of arsenic implanted silicon
2. Investigation of laser induced diffusion and annealing processes of arsenic-implanted silicon crystals
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