Kinetics and morphology of erbium silicide formation
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.335640
Reference17 articles.
1. Low Schottky barrier of rare‐earth silicide onn‐Si
2. The Schottky‐barrier height of the contacts between some rare‐earth metals (and silicides) andp‐type silicon
3. The formation of silicides from thin films of some rare‐earth metals
4. Contact reaction between Si and rare earth metals
5. Surface morphology and electronic properties of ErSi2
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1. Silicide Formation Process of Er Films with Ta and TaN Capping Layers;ACS Applied Materials & Interfaces;2013-11-25
2. Influence of growth parameters on the microstructures of erbium films deposited on Si(111) substrates;Vacuum;2012-07
3. Simulation of Fabricated 20-nm Schottky Barrier MOSFETs on SOI: Impact of Barrier Lowering;IEEE Transactions on Electron Devices;2012-05
4. Comparative study of erbium disilicide thin films grown in situ under ultrahigh vacuum or ex situ with a capping layer;Thin Solid Films;2012-04
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