Low‐temperature plasma enhanced chemical vapor deposition of SiO2
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.112475
Reference21 articles.
1. Plasma-enhanced chemical vapour deposition of silicon dioxide using tetraethoxysilane as silicon source
2. Downstream microwave plasma‐enhanced chemical vapor deposition of oxide using tetraethoxysilane
3. Electron Cyclotron Resonance Microwave Discharge for Oxide Deposition Using Tetraethoxysilane
4. Properties of silicon dioxide films deposited at low temperatures by microwave plasma enhanced decomposition of tetraethylorthosilicate
5. Deposition of silicon oxide films from TEOS by low frequency plasma chemical vapor deposition
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