1. Institute of Micro- and Nanoelectronic Systems KIT, 76187 Karlsruhe, Germany
2. DLR Institute of Optical Sensor Systems, 12489 Berlin, Germany
3. National University of Science and Technology MISIS, 119049 Moscow, Russia
4. Kotel'nikov Institute of Radio Engineering and Electronics, 125009 Moscow, Russia
5. Physical Institute, Karlsruhe Institute of Technology KIT, 76131 Karlsruhe, Germany