Magnetic condensation of a photoexcited plasma during fluoropolymer sputtering
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.345568
Reference16 articles.
1. Formation of pyrene crystalline thin films assisted by helium ion bombardment
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3. Spot deposition by focusing in Penning discharge sputtering
4. Formation of CF4− from CF4 clusters
5. Magnetic fields for surface containment of plasmas
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1. Nanowire–macropore weavelike structure self-assembled by partially crystalline polymer;Surface and Coatings Technology;2007-02
2. Gas-sorption effects on plasma polymer films characterized by XPS and quartz crystal resonator;Polymer;2000-01
3. Effects of photo-excitation and organic vapor treatment on vapor sorption behavior of sputtered fluoropolymer films;Thin Solid Films;1999-01
4. Fluoropolymer films produced by sputtering using inductively coupled plasma ion source and their organic vapor sorption characteristics;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1998-11
5. Molecular sensing using plasma polymer thin-film probes;Sensors and Actuators B: Chemical;1993-01
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