Experimental and ab initio study of the infrared spectra of ionic species derived from SF6 and SF4 and trapped in solid neon
Author:
Publisher
AIP Publishing
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.476440
Reference75 articles.
1. Plasma etching of Si and SiO2in SF6–O2mixtures
2. Dry Etching of Silicon Materials in SF 6 Based Plasmas: Roles of and Gas Additives
3. Mass Spectrometry of Discharge Products at 13.56 MHz inSF6Gas
4. Optical and mass spectrometric investigations of ions and neutral species inSF6radio-frequency discharges
5. Structure and thermochemistry of sulfur fluorides SFn(n=1–5) and their ions SF+n(n=1–5)
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