Nonlinear and linearized algorithms for the Young’s modulus extraction of thin films through the capacitance-voltage measurement of microstructures-Reference-Cited by-同舟云学术

Nonlinear and linearized algorithms for the Young’s modulus extraction of thin films through the capacitance-voltage measurement of microstructures

Published:2005-11-15 Issue:10 Volume:98 Page:104504
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Hu Yuh-Chung,Tu Wei-Hsiang

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.2133898

Reference22 articles.

1. M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures

2. Dynamic micromechanics on silicon: Techniques and devices

3. H. A.C. Tilmans, “Micro-mechanical sensors using encapsulate built-in resonant strain gauges,” Ph.D. dissertation, MESA Research Institute, University Twente, Enschede, The Netherlands (1993).

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