Plasma-etching of 2D-poled glasses: A route to dry lithography-Reference-Cited by-同舟云学术

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Plasma-etching of 2D-poled glasses: A route to dry lithography

Published:2017-09-11 Issue:11 Volume:111 Page:111604
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Alexandrov S. E.¹,Lipovskii A. A.¹²^ORCID,Osipov A. A.¹^ORCID,Reduto I. V.¹²³^ORCID,Tagantsev D. K.¹⁴

Affiliation:

1. Peter the Great St.-Petersburg Polytechnic University, St.-Petersburg 195251, Russia

2. St.-Petersburg Academic University, St.-Petersburg 194021, Russia

3. University of Eastern Finland, Joensuu 10044, Finland

4. Research and Technological Institute of Optical Materials Science, St.-Petersburg 192171, Russia

Funder

Russian Science Foundation (RSF)

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4994082

Reference13 articles.

1. Electric field distribution and near-surface modifications in soda-lime glass submitted to a dc potential

2. How Does Thermal Poling Affect the Structure of Soda-Lime Glass?

3. Imprinting phase/amplitude patterns in glasses with thermal poling

4. Low-temperature fabrication of fine structures on glass using electrical nanoimprint and chemical etching

5. Micro-structuring the surface reactivity of a borosilicate glass via thermal poling

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1. The influence of phosphate glass structure on results of thermal poling;Journal of Physics: Condensed Matter;2024-02-26

2. Spatially-microstructured topology of chalcogenide glasses by a combination of electrothermal process and selective etching for functional infrared media;Optical Materials Express;2021-12-21

3. PDMS Microfabrication and Design for Microfluidics and Sustainable Energy Application: Review;Micromachines;2021-10-31

4. Materials and methods for microfabrication of microfluidic devices;Microfluidic Devices for Biomedical Applications;2021

5. Influence of operation parameters on BOSCH-process technological characteristics;Materials Today: Proceedings;2020

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