3ω correction method for eliminating resistance measurement error due to Joule heating-Reference-Cited by-同舟云学术

3ω correction method for eliminating resistance measurement error due to Joule heating

Published:2021-09-01 Issue:9 Volume:92 Page:094711
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Guralnik Benny¹²^ORCID,Hansen Ole²^ORCID,Henrichsen Henrik H.¹,Beltrán-Pitarch Braulio²^ORCID,Østerberg Frederik W.¹^ORCID,Shiv Lior¹,Marangoni Thomas A.²^ORCID,Stilling-Andersen Andreas R.²^ORCID,Cagliani Alberto¹^ORCID,Hansen Mikkel F.¹^ORCID,Nielsen Peter F.¹^ORCID,Oprins Herman³^ORCID,Vermeersch Bjorn³^ORCID,Adelmann Christoph³^ORCID,Dutta Shibesh³^ORCID,Borup Kasper A.⁴^ORCID,Mihiretie Besira M.⁵^ORCID,Petersen Dirch H.²^ORCID

Affiliation:

1. CAPRES – A KLA Company, Diplomvej 373, 2800 Kgs. Lyngby, Denmark

2. Technical University of Denmark, DK-2800 Kgs. Lyngby, Denmark

3. Imec, Kapeldreef 75, B-3001 Leuven, Belgium

4. Department of Chemistry, Aarhus University, Langelandsgade 140, DK-8000 Aarhus C, Denmark

5. Hot Disk AB, SE-41288 Gothenburg, Sweden

Funder

Innovation Fund Denmark

Independent Research Fund Denmark

Publisher

AIP Publishing

Subject