Chemical vapor deposition of cobalt silicide
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.100558
Reference14 articles.
1. Electrical transport properties of transition‐metal disilicide films
2. Electrical transport properties of transition‐metal disilicide films
3. Low Pressure Chemical Vapor Deposition of Tantalum Silicide
4. CO2laser‐induced chemical vapor deposition of titanium silicide films
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