Single-phase driven ultrasonic motor using two orthogonal bending modes of sandwiching piezo-ceramic plates

Author:

Ma Yuting12,Choi Minkyu2,Uchino Kenji2

Affiliation:

1. CAS Key Lab of Bio-Medical Diagnostics, Suzhou Institute of Biomedical Engineering and Technology, Chinese Academy of Sciences, Suzhou, 215163 Jiangsu, China

2. International Center for Actuators and Transducers, The Pennsylvania State University, State College, Pennslyvania 16802, USA

Funder

National Natural Science Foundation of China (NSFC)

China Scholarship Council (CSC)

Office of Naval Research (ONR)

Publisher

AIP Publishing

Subject

Instrumentation

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