Applicability of one‐dimensional diffusion model for step coverage analysis—Comparison with a simple Monte Carlo method-Reference-Cited by-同舟云学术

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Applicability of one‐dimensional diffusion model for step coverage analysis—Comparison with a simple Monte Carlo method

Published:1995-07-31 Issue:5 Volume:67 Page:620-622
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Akiyama Y.,Imaishi N.

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.115408

Reference9 articles.

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