Phonon-boundary scattering in thin silicon layers
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.119402
Reference9 articles.
1. Low‐stiffness silicon cantilevers for thermal writing and piezoresistive readback with the atomic force microscope
2. Size Effect on Thermal Conduction in Silicon-on-Insulator Devices under Electrostatic Discharge (ESD) Conditions
3. Determination of the thermal conductivity of CMOS IC polysilicon
4. Annealing-temperature dependence of the thermal conductivity of LPCVD silicon-dioxide layers
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