Reactions of thin‐film titanium on silicon studied by Raman spectroscopy
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.95524
Reference7 articles.
1. See articles in Mater. Res. Soc. Sym. Proc.25(1983).MRSPDH0272-9172
2. Initial Phase formation at the Interface of Ni, Pd, or Pt and Si
3. Interference-Enhanced Raman Scattering of Very Thin Titanium and Titanium Oxide Films
4. Solid state reactions in titanium thin films on silicon
5. Thin film interaction between titanium and polycrystalline silicon
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