Diffusion and doping of Si into GaAs from undoped SiOx/SiN film
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.110348
Reference9 articles.
1. Nonalloyed ohmic contacts to Si‐implanted GaAs activated using SiOxNycapped infrared rapid thermal annealing
2. Diffusion of silicon in gallium arsenide using rapid thermal processing: Experiment and model
3. Silicon diffusion at polycrystalline‐Si/GaAs interfaces
4. The interdiffusion of Si, P, and In at polysilicon/GaAs interfaces
5. Physical and Electrical Properties of Memory Quality PECVD Silicon Oxynitride
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