A point-like source of extreme ultraviolet radiation based on a discharge in a non-uniform gas flow, sustained by powerful gyrotron radiation of terahertz frequency band-Reference-Cited by-同舟云学术

A point-like source of extreme ultraviolet radiation based on a discharge in a non-uniform gas flow, sustained by powerful gyrotron radiation of terahertz frequency band

Published:2014-10-27 Issue:17 Volume:105 Page:174101
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Glyavin M. Yu.¹,Golubev S. V.¹,Izotov I. V.¹,Litvak A. G.¹,Luchinin A. G.¹,Razin S. V.¹,Sidorov A. V.¹,Skalyga V. A.¹,Vodopyanov A. V.¹

Affiliation:

1. Institute of Applied Physics of Russian Academy of Sciences, 46 Ulyanova St., Nizhny Novgorod 603950, Russia

Funder

Russian Science Foundation

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4900751

Reference22 articles.

1. V. Bakshi , inEUV Sources for Lithography, edited by V. Bakshi ( SPIE Press, Bellingnam, 2005), p. 4.

2. A. Endo , inLithography, edited by M. Wang ( InTech, 2010), p. 161.

3. Comparative study on emission characteristics of extreme ultraviolet radiation from CO2 and Nd:YAG laser-produced tin plasmas

4. Next generation nanolithography based on Ru/Be and Rh/Sr multilayer optics

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