Cross‐sectional transmission electron microscope study of the growth kinetics of hexagonal MoSi2on (001)Si
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.337982
Reference14 articles.
1. Growth Kinetics Observed in the Formation of Metal Silicides on Silicon
2. Silicidbildung in dünnen molybdän- und wolframschichten auf einkristallinen siliziumsubstraten bei relativ niedrigen temperaturen
3. Investigation of phase-growth kinetics during interaction of silicon single crystals and molybdenum thin films
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