Fully automatic apparatus for the determination of doping profiles in Si by electrical measurements and anodic stripping
-
Published:1983-03
Issue:3
Volume:54
Page:369-373
-
ISSN:0034-6748
-
Container-title:Review of Scientific Instruments
-
language:en
-
Short-container-title:Review of Scientific Instruments
Author:
Galloni R.,Sardo A.
Cited by
37 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献