Measurement of forces and spring constants of microinstruments
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1148809
Reference12 articles.
1. Integrated micro‐scanning tunneling microscope
2. Micromachined infrared sensors using tunneling displacement transducers
3. A millinewton microloading device
4. Laterally Driven Polysilicon Resonant Microstructures
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