Characterization of aluminum nitride based films with high resolution X-ray fluorescence spectroscopy
Author:
Affiliation:
1. Department of Materials Science and Engineering, University of Ioannina, GR-45110 Ioannina, Greece
2. Department of Physics, Aristotle University of Thessaloniki, GR-54124 Thessaloniki, Greece
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5013281
Reference39 articles.
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