Positive ion polymerization in hydrogen diluted silane plasmas
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3042263
Reference24 articles.
1. Effect of Ion Bombardment on the Growth and Properties of Hydrogenated Amorphous Silicon-Germanium Alloys
2. Structural properties of a-Si:H related to ion energy distributions in VHF silane deposition plasmas
3. Ion bombardment effects on microcrystalline silicon growth mechanisms and on the film properties
4. The effect of ion-surface and ion-bulk interactions during hydrogenated amorphous silicon deposition
5. Ion‐Molecule Reactions in Silane
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