Continuous wave cavity ring down spectroscopy measurements of velocity distribution functions of argon ions in a helicon plasma
Author:
Funder
National Science Foundation
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3687429
Reference37 articles.
1. Measurement and modeling of ion energy distribution functions in a low pressure argon plasma diffusing from a 13.56 MHz helicon source
2. Ion energy distribution functions in a multipole confined argon plasma diffusing from a 13.56‐MHz helicon source
3. Effect of wall charging on an oxygen plasma created in a helicon diffusion reactor used for silica deposition
4. Plasma injection with helicon sources
5. Hydrogen ion beam generated by a current-free double layer in a helicon plasma
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