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A compact, resonant cavity, five centimeter, multicusp, ECR broad‐beam ion source

  • Published:1990-01 Issue:1 Volume:61 Page:285-287
  • ISSN:0034-6748
  • Container-title:Review of Scientific Instruments
  • language:en
  • Short-container-title:Review of Scientific Instruments

Author:

Mahoney L.,Asmussen J.

Publisher

AIP Publishing

Subject

Instrumentation

Cited by 24 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Microwave discharges at low pressures and peculiarities of the processes in strongly non-uniform plasma;Plasma Sources Science and Technology;2015-08-20

2. Review of the Cutoff Problem;Compact Plasma and Focused Ion Beams;2013-11-20

3. Multipactor experiment on a dielectric surface;Review of Scientific Instruments;2001-07

4. Design and performance of a versatile, cost-effective microwave electron cyclotron resonance plasma source for surface and thin film processing;Review of Scientific Instruments;2000-02

5. Holey-plate ion source;Review of Scientific Instruments;2000-02
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