Dynamics of a rf sheath in the range between the ionic and the electronic plasma frequencies
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.98236
Reference4 articles.
1. A model of radio frequency planar discharges
2. Low‐Frequency Impedance Characteristics of a Langmuir Probe in a Plasma
3. Frequency Conversion in the Sheath Capacitance of a Glow Discharge Plasma
4. Double probe model of radio frequency capacitively coupled planar discharges
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1. Laboratory Observation of Electron Phase-Space Holes during Magnetic Reconnection;Physical Review Letters;2008-12-18
2. Control of plasma parameters and wall sheath voltage in radio frequency magnetron discharge by grid bias;Journal of Applied Physics;2002-04
3. Observation of a plasma-sheath resonance in a parallel-plate low-pressure rf discharge;Plasma Sources Science and Technology;2001-08-14
4. Nonlinearity of the radio‐frequency sheath;Journal of Applied Physics;1996-04
5. Sheath impedance effects in very high frequency plasma experiments;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1996-01
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