Casimir and hydrodynamic force influence on microelectromechanical system actuation in ambient conditions
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4866167
Reference51 articles.
1. The role of the casimir effect in the static deflection and stiction of membrane strips in microelectromechanical systems (MEMS)
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4. The role of the casimir effect in the static deflection and stiction of membrane strips in microelectromechanical systems (MEMS)
5. The role of van der Waals forces in adhesion of micromachined surfaces
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3. Sensitivity of nonequilibrium Casimir forces on low frequency optical properties toward chaotic motion of microsystems: Drude vs plasma model;Chaos: An Interdisciplinary Journal of Nonlinear Science;2020-02
4. Dependence of non-equilibrium Casimir forces on material optical properties toward chaotic motion during device actuation;Chaos: An Interdisciplinary Journal of Nonlinear Science;2019-09
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