Surface morphology and straight crack generation of ultrafast laser irradiated β-Ga2O3-Reference-Cited by-同舟云学术

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Surface morphology and straight crack generation of ultrafast laser irradiated β-Ga2O3

Published:2019-06-14 Issue:22 Volume:125 Page:223104
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Ahn Minhyung¹^ORCID,Sarracino Alex²,Ansari Abdul²,Torralva Ben³^ORCID,Yalisove Steven⁴^ORCID,Phillips Jamie¹^ORCID

Affiliation:

1. Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, Michigan 48109, USA

2. Applied Physics Program, University of Michigan, Ann Arbor, Michigan 48109, USA

3. Department of Climate and Space Sciences and Engineering, University of Michigan, Ann Arbor, Michigan 48109, USA

4. Department of Materials Science and Engineering, University of Michigan, Ann Arbor, Michigan 48109, USA

Funder

Lloyd's Register Foundation

Air Force Office of Scientific Research

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/am-pdf/10.1063/1.5091700

Reference37 articles.

1. A review of Ga2O3materials, processing, and devices

2. Large-size β-Ga2O3 single crystals and wafers

3. Ultrafast laser processing of materials: a review

4. Femtosecond laser micromachining in transparent materials

5. Two-photon absorption and Kerr coefficients of silicon for 850–2200nm

Cited by 11 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Molecular dynamics study of the potential formation thickness of ultrafast laser induced sapphire crystal surface recast layer;Materials Science in Semiconductor Processing;2024-06

2. Process exploration of β-Ga2O3 blind hole processing by water-assisted femtosecond laser technology;Journal of Alloys and Compounds;2023-04

3. High-performance antireflection nanostructure arrays on aluminum-doped zinc oxide film fabricated with femtosecond laser near-field processing;Applied Surface Science;2023-04

4. Patterning the surface structure of transparent hard-brittle material β-Ga2O3 by ultrashort pulse laser;Ceramics International;2022-10

5. Comparative study of GaAs nanostructures synthesized in air and distilled water by picosecond pulsed laser ablation and application in hazardous molecules detection;Journal of Laser Applications;2022-08

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