Characterization of SiO2/SiC interface states and channel mobility from MOSFET characteristics including variable-range hopping at cryogenic temperature
Author:
Funder
New Energy and Industrial Technology Development Organization
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5027695
Reference34 articles.
1. Fundamentals of Silicon Carbide Technology
2. Improved inversion channel mobility for 4H-SiC MOSFETs following high temperature anneals in nitric oxide
3. Effects of Nitridation on 4H-SiC MOSFETs Fabricated on Various Crystal Faces
4. Effect of gate oxidation method on electrical properties of metal-oxide-semiconductor field-effect transistors fabricated on 4H-SiC C(0001̄) face
5. Coexistence of Small Threshold Voltage Instability and High Channel Mobility in 4H-SiC($000\bar{1}$) Metal–Oxide–Semiconductor Field-Effect Transistors
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1. Design and Simulation of Bi-Layer Optimized High K- Dielectric Medium for N-Mosfet with Wild Horse Optimization to Improve Electrical Characteristics;ECS Journal of Solid State Science and Technology;2024-07-01
2. Energy levels of carbon dangling-bond center (PbC center) at 4H-SiC(0001)/SiO2 interface;APL Materials;2023-11-01
3. Sources of error and methods to improve accuracy in interface state density analysis using quasi-static capacitance–voltage measurements in wide bandgap semiconductors;Journal of Applied Physics;2023-09-25
4. Effect of nitrogen introduced at the SiC/SiO2interface and SiC side on the electronic states by first-principles calculation;Japanese Journal of Applied Physics;2023-06-01
5. Atomic scale localization of Kohn–Sham wavefunction at SiO2/4H–SiC interface under electric field, deviating from envelope function by effective mass approximation;Applied Physics Letters;2023-05-29
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