Self-organized pattern formation in radio frequency capacitively coupled discharges
Author:
Affiliation:
1. Applied Materials, Inc., 1140 E. Arques Ave., Sunnyvale, California 94085, USA
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
https://aip.scitation.org/doi/pdf/10.1063/5.0028599
Reference24 articles.
1. Striations in a Low-Pressure RF-Driven Argon Plasma
2. Cylindrical stationary striations in surface wave produced plasma columns of argon
3. Experimental investigation of different structures of a radio frequency produced plasma column
4. Study of transverse and longitudinal bifurcation for pattern formations of a plasma column
5. Plasma stratification in radio-frequency discharges in argon gas
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