Nanometer focusing of hard x rays by phase zone plates
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1149744
Reference11 articles.
1. Process optimization for production of sub-20 nm soft x-ray zone plates
2. Low-distortion electron-beam lithography for fabrication of high-resolution germanium and tantalum zone plates
3. Electron beam lithography digital pattern generator and electronics for generalized curvilinear structures
4. Hard x‐ray phase zone plate fabricated by lithographic techniques
5. Status Of The Sputtered Sliced Zone Plates For X-Ray Microscopy
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