Modeling radio‐frequency discharges: Effects of collisions upon ion and neutral particle energy distributions
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.350882
Reference20 articles.
1. A charged‐particle analyzer for radio‐frequency discharges
2. Structured ion energy distribution in radio frequency glow‐discharge systems
3. Ion bombardment in rf plasmas
4. Ion and electron energy analysis at a surface in an RF discharge
5. Plasma potentials of 13.56‐MHz rf argon glow discharges in a planar system
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