OUTDIFFUSION THROUGH SILICON OXIDE AND SILICON NITRIDE LAYERS ON GALLIUM ARSENIDE
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1653422
Reference6 articles.
1. Diffusion Measurements in the System Cu-Au by Elastic Scattering
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3. Enhanced Diffusion and Out‐Diffusion in Ion‐Implanted Silicon
4. THE DETERMINATION OF SURFACE CONTAMINATION ON SILICON BY LARGE ANGLE ION SCATTERING
5. Vapor pressures and phase equilibria in the GaAs system
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