Effects of hydrogen and rf power on the structural and electrical properties of rf sputtered hydrogenated amorphous silicon carbide films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.362959
Reference11 articles.
1. High Performance A–Si Solar Cells and Narrow Bandgap Materials
2. Recent Progress of Amorphous Silicon Solar Cell Technology
3. Photoelectric application of a-Si:H and related material-image devices
4. Structural properties of amorphous silicon carbide films by plasma‐enhanced chemical vapor deposition
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