Formation of highly uniform silicon nanoparticles in high density silane plasmas
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1591412
Reference26 articles.
1. Experimental study of the influence of nanoparticle generation on the electrical characteristics of argon–silane capacitive radio-frequency plasmas
2. Global visualization of powder trapping in capacitive RF plasmas by two-dimensional laser scattering
3. Exhaust Aerosol of a Plasma Enhanced CVD System: I. Size Distribution Measurements
4. Particle formation and a-Si:H film deposition in narrow-gap RF plasma CVD
5. Growth, trapping and abatement of dielectric particles in PECVD systems
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