Effect of the nature of the substrate on the surface chemistry of atomic layer deposition precursors
Author:
Affiliation:
1. Department of Chemistry, University of California, Riverside, California 92521, USA
2. Department of Chemistry, Carleton University, Ottawa, Ontario K1S 5B6, Canada
Funder
U.S. Department of Energy (DOE)
Publisher
AIP Publishing
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Link
http://aip.scitation.org/doi/am-pdf/10.1063/1.4966201
Reference45 articles.
1. A brief review of atomic layer deposition: from fundamentals to applications
2. History of atomic layer deposition and its relationship with the American Vacuum Society
3. Atomic Layer Deposition: An Overview
4. In SituStudies on Reaction Mechanisms in Atomic Layer Deposition
5. Mechanisms of surface reactions in thin solid film chemical deposition processes
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