Transient heating and melting transformations in argon‐ion laser irradiation of polysilicon films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.353925
Reference18 articles.
1. Stress in polycrystalline and amorphous silicon thin films
2. Laser crystallization of thin Si films on amorphous insulating substrates
3. Recrystallization of Si on amorphous substrates by doughnut‐shaped cw Ar laser beam
4. Thermal profiles during recrystallization of silicon on insulator with scanning incoherent light line sources
5. Experimental and Computational Analysis of Laser Melting of Thin Silicon Films
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Heat Transfer in Excimer Laser Melting of Thin Polysilicon Layers;Journal of Heat Transfer;1995-08-01
2. Optical measurements of thermal diffusivity of a material;International Journal of Thermophysics;1995-07
3. Transient Temperature During Pulsed Excimer Laser Heating of Thin Polysilicon Films Obtained by Optical Reflectivity Measurement;Journal of Heat Transfer;1995-02-01
4. Near‐threshold laser sputtering of gold;Journal of Applied Physics;1995-01-15
5. Laser processing of thin semiconductor films;Transport in Laser Microfabrication
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