The complex impact of silicon and oxygen on the n-type conductivity of high-Al-content AlGaN
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4800978
Reference23 articles.
1. Intentional control of n-type conduction for Si-doped AlN and AlXGa1−XN (0.42⩽x<1)
2. High-conductivityn-AlGaN with high Al mole fraction grown by metalorganic vapor phase deposition
3. Transport properties of highly conductive n-type Al-rich AlxGa1−xN(x⩾0.7)
4. Progress on n-type doping of AlGaN alloys on AlN single crystal substrates for UV optoelectronic applications
5. Metalorganic Chemical Vapor Deposition Conditions for Efficient Silicon Doping in High Al-Composition AlGaN Films
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