Maskless laser nano-lithography of glass through sequential activation of multi-threshold ablation
Author:
Affiliation:
1. The Institute of Optics, University of Rochester, Rochester, New York 14627, USA
2. Changchun Institute of Optics, Fine Mechanics, and Physics, Changchun 130033, China
Funder
National Science Foundation
Defense Advanced Research Projects Agency
Bill and Melinda Gates Foundation
Army Research Office
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/am-pdf/10.1063/1.5080344
Reference45 articles.
1. Optical lithography—present and future challenges
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